Glass-Conveying-Module

Our handling systems use ultrasound-air-bearing and can be applied in any atmospheric process. The ultrasound-air-bearing generates a supporting gas film (air or process-gas) between surface and the substrate, therefore, any mechanical contact is avoided. The substrate hovers on a supporting gas film at a height of 50 - 500 μm.

Modular design

The non-contact conveyors facilitate a smooth and friction free transport of substrates. The systems are designed as modules which can be assembled to arrays of any length and width.

Double-Sided Inspection of Substrates

We offer two approaches to realize a double-sided inspection of substrates:

Intersection of the transfer system

with a gap up to 20mm. This distance can easily be crossed by the substrates, while the inspection is done through this gap (e.g. by optical sensors, linear cameras).

Using glass as the transfer system

The substrate can be inspected by optical means through the glass.