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Our handling systems use ultrasound-air-bearing and can be applied in any atmospheric process. The ultrasound-air-bearing generates a supporting gas film (air or process-gas) between surface and the substrate, therefore, any mechanical contact is avoided. The substrate hovers on a supporting gas film at a height of 50 - 500 μm.


Modular design

The non-contact conveyors facilitate a smooth and friction free transport of substrates. The systems are designed as modules which can be assembled to arrays of any length and width.


Double-Sided Inspection of Substrates

We offer two approaches to realize a double-sided inspection of substrates:


Intersection of the transfer system

with a gap up to 20mm. This distance can easily be crossed by the substrates, while the inspection is done through this gap (e.g. by optical sensors, linear cameras).


Using glass as the transfer system

The substrate can be inspected by optical means through the glass.


Technical Data
Electrical Equipment max. 300 W, 230 V AC (ultrasound)
Distance (tool-substrate) 100 µm
Interfaces available PROFIBUS, PROFINET, EtherCAT, OPC
Your Benefits
  • The ultrasound air bearing technology offers a series of benefits compared to state-of-the-art solutions:
  • No surface contact and therefore no damages due to non-contact handling
  • More degrees of freedom in process and machine design
  • High planarity of the substrate during transfer process
  • Conveying
  • Inspection
  • Coating
  • No mechanical contact between handling-device and substrate
  • Handling at processed / coated surfaces
Products to be combined
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