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Photovoltaic Wafer-Picker-Module |
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기술데이터 | ||
Air Consumption | 40 - 80 l/min (separation) | |
Low Pressure | 120 l/min, 40 mbar | |
Electrical Equipment | max.50 W, 230 V (ultrasound) | |
20 W, 24 V (drives) | ||
Distance (tool-substrate) | 100 - 300 μm | |
Cycle Time | 2 wafers/s (0,5 s/wafer) | |
Interfaces available | PROFIBUS, PROFINET, EtherCAT, OPC | |
제품장점
- Lowest breakage-rate (< 70 ppm)
- Higher throughput / short cycle times
- Lower energy consumption
- Modular design
응용분야
- Wafer separation
- Unloading
- Pick & place processes
중점정보
- 2 wafers/s (0,5 s/wafer)
- No mechanical contact between the tool and the substrate
- Suitable for thin wafers down to 100 μm
- Picking / separation distance up tp 12 mm